{"title":"全固态深紫外激光器的研究进展","authors":"M. Oka, H. Masuda, H. Kikuchi, S. Kubota","doi":"10.1109/LEOS.1996.571923","DOIUrl":null,"url":null,"abstract":"High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography. We report progress in improving the quality of Czochralski-grown /spl beta/-BaB/sub 2/O/sub 4/ (BBO) which is essential for generating high average output power in the deep ultraviolet regime. In order to evaluate our CZ grown BBO, a flash-lamp pumped Q-switched Nd:YAG laser (Quantel YG-682S) was employed.","PeriodicalId":332726,"journal":{"name":"Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1996-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Progress in all-solid-state deep-ultraviolet lasers\",\"authors\":\"M. Oka, H. Masuda, H. Kikuchi, S. Kubota\",\"doi\":\"10.1109/LEOS.1996.571923\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography. We report progress in improving the quality of Czochralski-grown /spl beta/-BaB/sub 2/O/sub 4/ (BBO) which is essential for generating high average output power in the deep ultraviolet regime. In order to evaluate our CZ grown BBO, a flash-lamp pumped Q-switched Nd:YAG laser (Quantel YG-682S) was employed.\",\"PeriodicalId\":332726,\"journal\":{\"name\":\"Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-11-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LEOS.1996.571923\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOS.1996.571923","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Progress in all-solid-state deep-ultraviolet lasers
High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography. We report progress in improving the quality of Czochralski-grown /spl beta/-BaB/sub 2/O/sub 4/ (BBO) which is essential for generating high average output power in the deep ultraviolet regime. In order to evaluate our CZ grown BBO, a flash-lamp pumped Q-switched Nd:YAG laser (Quantel YG-682S) was employed.