热声线键的力学和结构分析

Janos Szecsenyi, R. Bátorfi, Z. Illyefalvi-Vitéz
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引用次数: 0

摘要

为了达到优异的微线键合可靠性,制造商必须采用高质量的材料。本文讨论了两种ENEPIG(化学镀镍-化学镀钯-浸金)表面处理在热超声金丝键合端子铜片上的比较。两个样品之间的主要区别是顶部金层的厚度。利用能量色散x射线能谱法计算层厚度。经检查的样品的厚度与规格完全吻合。采用Alpha阶跃曲面轮廓仪检测表面粗糙度;利用原子力显微镜(AFM)获得了高分辨率的表面图像。发现的表面的粗糙,肯定是由于铜片的滚动,可能会对键的强度产生负面影响,因为缝线键与表面接触的面积更小。经过越来越多的热冲击试验,通过测量粘结剪切力来验证其可靠性。我们注意到剪切力随着热循环次数的增加而增加。试验结果表明,采用较薄的金层覆盖的低成本表面处理可以取代较厚的金层结构。
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Mechanical and structural analysis of thermosonic wire bonds
To reach excellent reliability of micro wire bonds, manufacturers must apply materials at high quality. This work discusses the comparison of two kinds of ENEPIG (Electroless Nickel - Electroless Palladium - Immersion Gold) surface finishes on copper sheets of terminals used for thermosonic gold wire bonding. The main difference between the two samples is the thickness of the gold layers on the top. To estimate the thickness of the layers a calculation based on EDS (Energy Dispersive X-ray Spectrometry) method was used. The thicknesses of the checked samples showed perfect match with the specification. The surface roughness was examined by Alpha Step Surface Profiler; and AFM (Atomic Force Microscope) was used to get a picture about the surface in higher resolution. The discovered raggedness of the surface, which certainly originates from the rolling of the copper sheet, may influence negatively the strength of the bonds, because the stitch bond gets in touch with the surface on a smaller area. The reliability was tested by measuring bond shear force after more and more cycles of thermal shock test. We noticed that the shear force increased with the advance of the number of the thermal cycles. According to the examinations the low cost surface finish covered with thinner gold layer can replace the more expensive layer structure with thicker gold.
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