{"title":"带有CMOS接口电路的混合硅微加速度计系统","authors":"A. Salian, H. Kulah, N. Yazdi, G. He, K. Najafi","doi":"10.1109/MWSCAS.2000.951626","DOIUrl":null,"url":null,"abstract":"This paper presents a hybrid microaccelerometer subsystem consisting of an all-silicon /spl mu/g capacitive microaccelerometer and a low noise CMOS capacitive interface circuit. This accelerometer has a measured sensitivity of 1.4pF/g for a device with 2mm /spl times/ 1mm proof mass and 1.4/spl mu/m air gap. The calculated mechanical noise floor for the device is 0.39/spl mu/g/vHz in atmosphere. The circuit has a 95dB dynamic range; a low offset of 370/spl mu/V and can resolve better than 75aF. The overall sensitivity of the complete module is measured as 160mV/g with a noise floor of 3.6/spl mu/V/vHz (-110dBV/vHz), indicating that the current system is capable of resolving about 20/spl mu/g/vHz.","PeriodicalId":437349,"journal":{"name":"Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Hybrid silicon microaccelerometer system with CMOS interface circuit\",\"authors\":\"A. Salian, H. Kulah, N. Yazdi, G. He, K. Najafi\",\"doi\":\"10.1109/MWSCAS.2000.951626\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a hybrid microaccelerometer subsystem consisting of an all-silicon /spl mu/g capacitive microaccelerometer and a low noise CMOS capacitive interface circuit. This accelerometer has a measured sensitivity of 1.4pF/g for a device with 2mm /spl times/ 1mm proof mass and 1.4/spl mu/m air gap. The calculated mechanical noise floor for the device is 0.39/spl mu/g/vHz in atmosphere. The circuit has a 95dB dynamic range; a low offset of 370/spl mu/V and can resolve better than 75aF. The overall sensitivity of the complete module is measured as 160mV/g with a noise floor of 3.6/spl mu/V/vHz (-110dBV/vHz), indicating that the current system is capable of resolving about 20/spl mu/g/vHz.\",\"PeriodicalId\":437349,\"journal\":{\"name\":\"Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144)\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-08-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MWSCAS.2000.951626\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSCAS.2000.951626","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Hybrid silicon microaccelerometer system with CMOS interface circuit
This paper presents a hybrid microaccelerometer subsystem consisting of an all-silicon /spl mu/g capacitive microaccelerometer and a low noise CMOS capacitive interface circuit. This accelerometer has a measured sensitivity of 1.4pF/g for a device with 2mm /spl times/ 1mm proof mass and 1.4/spl mu/m air gap. The calculated mechanical noise floor for the device is 0.39/spl mu/g/vHz in atmosphere. The circuit has a 95dB dynamic range; a low offset of 370/spl mu/V and can resolve better than 75aF. The overall sensitivity of the complete module is measured as 160mV/g with a noise floor of 3.6/spl mu/V/vHz (-110dBV/vHz), indicating that the current system is capable of resolving about 20/spl mu/g/vHz.
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