273nm深紫外激光器波导结构优化

YanChun Gu, Fang Wang, Yuhuai Liu
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引用次数: 0

摘要

该二极管的半最大值全宽度(FWHM)非常窄,具有小的阈值电流和高的发光功率。通过仿真可以看出,ld不同横向位置的辐射复合率和波强是不同的。高铝成分的波导层具有较低的折射率,可以减小光的发散角。本文通过逐步增加向p包层方向的Al分量,减少向p面方向的Al分量来优化器件结构。与原结构相比,分级波导具有更好的电学特性和更小的频宽。
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Structural optimization of 273nm deep ultraviolet laser in wave guide
The full width at half maxima (FWHM) of the LDs is very narrow, with small threshold current and high luminous power. Through simulation, it can be seen that the radiation recombination rate and wave intensity of different lateral positions of LDs are different. The waveguide layer of the high Al composition has a lower refractive index and can reduce the divergence angle of light. In this paper, the device structure is optimized by gradually increasing the Al component toward the p-cladding layer and decreasing the Al component toward p-side. Compared with the original structure, the grading wave guide proves that it can have better electrical characteristics and the FWHM is smaller.
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