非均匀载流子分布对平均电阻率的影响:以多晶硅颗粒为例

S. V. Sputai
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引用次数: 0

摘要

多晶半导体薄膜的晶界捕获自由载流子产生空间电荷区。耗尽区长度取决于捕获态密度和颗粒内自由载流子浓度。由于损耗区的载流子浓度较低,损耗区的电阻可能高于晶粒的其他部分。结果表明,自由载流子的平均浓度和比电阻率与晶粒中自由载流子均匀分布的情况有显著不同。
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Effect of nonuniform carrier distribution on average resistivity: Case of polysilicon grains
Grain boundaries of polycrystalline semiconductor film trap free carriers creating space charge regions. The length of the depleted regions depends on the trapping states density and free carriers concentration within the grains. As the carrier concentration within depletion region is lower the resistance there can is higher than in the rest of the grain. It is shown that the average concentration of free carriers and specific resistivity can be significantly different from that obtained for the case of uniform free carrier distribution in the grain.
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