单轴机械应力对饱和状态下FD SOI nmosfet低频噪声的影响

M. A. S. de Saouza, R. T. Doria, M. Pavanello, C. Claeys, E. Simoen
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引用次数: 0

摘要

本文研究了饱和状态下机械应力对平面SOI晶体管低频噪声的影响。对几个通道长度进行了测量,结果表明,对于与通道长度无关的应变器件,低频噪声的降低是有效的,并且这种降低对于较小的通道长度更有效。
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Uniaxial mechanical stress influence on the low frequency noise in FD SOI nMOSFETs operating in saturation
This work presents a study of the influence of mechanical stress on the low frequency noise in planar SOI transistors operating in saturation. Several channel lengths were measured, and the results show a reduction of the low frequency noise for strained devices independent of the channel length, and this reduction is more effective for smaller channel lengths.
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