基于薄膜体声谐振器的微机械质量传感器

Yan-lu Feng, Mengwei Liu, Xin Li, Jian Li
{"title":"基于薄膜体声谐振器的微机械质量传感器","authors":"Yan-lu Feng, Mengwei Liu, Xin Li, Jian Li","doi":"10.1109/SPAWDA.2015.7364478","DOIUrl":null,"url":null,"abstract":"In this paper, an Al-ZnO-Al film bulk acoustic resonator (FBAR) is described, which has a high mass sensitivity. And the series resonant frequency (fs) and parallel resonant frequency (fP) of the micromachined FBAR have been measured by using a network analyzer, which are 1.546 GHz and 1.590 GHz, respectively (close to the theoretical value simulated by mason equivalent circuit model). Moreover, the effective electromechanical coupling coefficient (Keff2) and quality Q have been calculated to be 6.83% and 350, respectively. After the FBAR packaging, the mass loading was added on the FBAR backside surface by sputtering different thicknesses of ZnO layer. From the graph of the resonant frequency versus added ZnO thickness, the FBAR is measured to have a mass sensitivity Sm of 1116.55 cm2 / g. The result is almost agreed with the theoretical value of 1166.86 cm2 / g, which is about 80 times of the conventional quartz crystal microbalance (QCM).","PeriodicalId":205914,"journal":{"name":"2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)","volume":"37 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Micromachined mass sensor based on film bulk acoustic resonator\",\"authors\":\"Yan-lu Feng, Mengwei Liu, Xin Li, Jian Li\",\"doi\":\"10.1109/SPAWDA.2015.7364478\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, an Al-ZnO-Al film bulk acoustic resonator (FBAR) is described, which has a high mass sensitivity. And the series resonant frequency (fs) and parallel resonant frequency (fP) of the micromachined FBAR have been measured by using a network analyzer, which are 1.546 GHz and 1.590 GHz, respectively (close to the theoretical value simulated by mason equivalent circuit model). Moreover, the effective electromechanical coupling coefficient (Keff2) and quality Q have been calculated to be 6.83% and 350, respectively. After the FBAR packaging, the mass loading was added on the FBAR backside surface by sputtering different thicknesses of ZnO layer. From the graph of the resonant frequency versus added ZnO thickness, the FBAR is measured to have a mass sensitivity Sm of 1116.55 cm2 / g. The result is almost agreed with the theoretical value of 1166.86 cm2 / g, which is about 80 times of the conventional quartz crystal microbalance (QCM).\",\"PeriodicalId\":205914,\"journal\":{\"name\":\"2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)\",\"volume\":\"37 4\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SPAWDA.2015.7364478\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA.2015.7364478","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

本文描述了一种具有高质量灵敏度的Al-ZnO-Al薄膜体声谐振器(FBAR)。利用网络分析仪测量了微加工FBAR的串联谐振频率fs和并联谐振频率fP,分别为1.546 GHz和1.590 GHz(接近梅森等效电路模型模拟的理论值)。计算得到有效机电耦合系数Keff2为6.83%,质量Q为350。在FBAR封装后,通过溅射不同厚度的ZnO层在FBAR背面增加质量载荷。由谐振频率随ZnO厚度的变化曲线可知,FBAR的质量灵敏度Sm为1116.55 cm2 / g,与理论值1166.86 cm2 / g基本一致,是传统石英晶体微天平(QCM)的80倍左右。
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Micromachined mass sensor based on film bulk acoustic resonator
In this paper, an Al-ZnO-Al film bulk acoustic resonator (FBAR) is described, which has a high mass sensitivity. And the series resonant frequency (fs) and parallel resonant frequency (fP) of the micromachined FBAR have been measured by using a network analyzer, which are 1.546 GHz and 1.590 GHz, respectively (close to the theoretical value simulated by mason equivalent circuit model). Moreover, the effective electromechanical coupling coefficient (Keff2) and quality Q have been calculated to be 6.83% and 350, respectively. After the FBAR packaging, the mass loading was added on the FBAR backside surface by sputtering different thicknesses of ZnO layer. From the graph of the resonant frequency versus added ZnO thickness, the FBAR is measured to have a mass sensitivity Sm of 1116.55 cm2 / g. The result is almost agreed with the theoretical value of 1166.86 cm2 / g, which is about 80 times of the conventional quartz crystal microbalance (QCM).
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