最新标度定律调制下的过程集成挑战

2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors Pub Date : 2006-10-01 DOI:10.1109/RTP.2006.367974

S. Nakai

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摘要

CMOS标度定律已经失去了物理基础，仅凭标度定律得出的结果仍然被用于满足技术用户的需求。本文讨论了CMOS缩水率的实际情况和预测

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Process-Integration Challenges with Up-To-Date Modulation of Scaling Laws

CMOS scaling laws have already lost the physical bases, and the merest results induced by scaling laws are still utilized for requirements from technology users. In this paper, the actual situation of CMOS shrinkage and a forecast are discussed

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2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors

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