{"title":"利用宽带光源的光学低相干干涉技术表征侧壁布拉格光栅","authors":"Chen Zhang, Xin Wang, C. Madsen","doi":"10.1117/12.2080104","DOIUrl":null,"url":null,"abstract":"In this work, we present fabrication and measurement of sidewall Bragg gratings in chalcogenide arsenic tri-sulfide (As2S3) on titanium-diffused lithium niobate (Ti:LiNbO3) channel waveguides. The transfer matrix method was used to analyze the temporal and spectral response of the sidewall gratings in the mid-infrared. The waveguide sidewall Bragg gratings were fabricated by electron-beam lithography (EBL), metal liftoff and subsequent reactive-ion etching (RIE). Insertion loss of the mid-infrared Ti:LiNbO3 optical waveguides were measured at ~2 dB and the propagation loss was estimated to be 0.45 dB/cm. Configuration of an optical low-coherence interferometer that is capable of characterizing the mid-infrared sidewall grating-based devices was experimentally implemented and preliminary results from fiber Bragg gratings are presented.","PeriodicalId":432115,"journal":{"name":"Photonics West - Optoelectronic Materials and Devices","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Characterization of sidewall Bragg gratings using optical low-coherence interferometry with a broadband source\",\"authors\":\"Chen Zhang, Xin Wang, C. Madsen\",\"doi\":\"10.1117/12.2080104\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we present fabrication and measurement of sidewall Bragg gratings in chalcogenide arsenic tri-sulfide (As2S3) on titanium-diffused lithium niobate (Ti:LiNbO3) channel waveguides. The transfer matrix method was used to analyze the temporal and spectral response of the sidewall gratings in the mid-infrared. The waveguide sidewall Bragg gratings were fabricated by electron-beam lithography (EBL), metal liftoff and subsequent reactive-ion etching (RIE). Insertion loss of the mid-infrared Ti:LiNbO3 optical waveguides were measured at ~2 dB and the propagation loss was estimated to be 0.45 dB/cm. Configuration of an optical low-coherence interferometer that is capable of characterizing the mid-infrared sidewall grating-based devices was experimentally implemented and preliminary results from fiber Bragg gratings are presented.\",\"PeriodicalId\":432115,\"journal\":{\"name\":\"Photonics West - Optoelectronic Materials and Devices\",\"volume\":\"63 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-04-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photonics West - Optoelectronic Materials and Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2080104\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photonics West - Optoelectronic Materials and Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2080104","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Characterization of sidewall Bragg gratings using optical low-coherence interferometry with a broadband source
In this work, we present fabrication and measurement of sidewall Bragg gratings in chalcogenide arsenic tri-sulfide (As2S3) on titanium-diffused lithium niobate (Ti:LiNbO3) channel waveguides. The transfer matrix method was used to analyze the temporal and spectral response of the sidewall gratings in the mid-infrared. The waveguide sidewall Bragg gratings were fabricated by electron-beam lithography (EBL), metal liftoff and subsequent reactive-ion etching (RIE). Insertion loss of the mid-infrared Ti:LiNbO3 optical waveguides were measured at ~2 dB and the propagation loss was estimated to be 0.45 dB/cm. Configuration of an optical low-coherence interferometer that is capable of characterizing the mid-infrared sidewall grating-based devices was experimentally implemented and preliminary results from fiber Bragg gratings are presented.