一种采用相变母带的低噪声耐用多层光盘传输压片机

2006 Optical Data Storage Topical Meeting Pub Date : 2006-06-05 DOI:10.1117/12.692308

Y. Aoki, K. Morita, K. Deguchi, T. Miyakoshi, Y. Miyaoka, T. Hiroki, O. Koyama

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引用次数: 3

摘要

研制了WOx薄膜的负型光刻胶，获得了低噪声槽。我们还证实了将WOx薄膜用于多层光盘的传动冲压件的可行性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Low-Noise Durable Transmissive Stamper for Multi-Layer Discs using Phase Transition Mastering

We developed a negative-type photoresist of WOx film and obtained a low noise groove. We also confirmed a feasibility of the transmissive stamper using the WOx film for multi-layer discs.

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2006 Optical Data Storage Topical Meeting

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