Inter Laboratory Comparison of High Resistance Standard in Japan

To validate a calibration capability of calibration laboratories, it is necessary to carry out an appropriate inter laboratory comparison. However, as is often the case with some extreme ranges of the measurements, e. g., extremely high resistance, it is difficult to arrange such a comparison. In this study, in the collaboration work between the National Metrology Institute of Japan (NMIJ/AIST) and calibration laboratories, an inter-laboratory comparison for extremely high resistance standards as high as 100 TΩ has been established. The demonstration of validation of calibration capability has been performed from 1 MΩ to 100 GΩ with a set of stable high-resistance standard resistors circulating among three participants. The NMIJ/AIST provided the reference value for this comparison, and each of the three participants calibrated the circulated set of artifacts employing their system built to be traceable to the national standard. Although the equipment and traceability scheme differed among the participants, the results agreed well and the En values of each laboratory were below 1. At the conference, the protocol and final report of this comparison will be presented.