AI-FDC: Automated Top Down System for Fab Wide Process Equipment Health Monitoring

We have developed a novel technique to handle Fault Detection and Classification data for Equipment Health Monitoring. While most techniques are very human intensive, this AI-FDC technique allows for less human interaction by taking advantage of recent advancements in Machine Learning. Raw traces are automatically broken down into windows with consistent characteristics, relevant statistics are automatically calculated based on window characteristics, and anomalous traces are detected by the system without labels. This system will accelerate root cause diagnosis of Equipment Breakdowns and prevent subsequent breakdowns.