低于5纳米飞行高度滑块的加载/卸载过程

Ee-Ling Kek, Yansheng Ma, S. Sinha, Bo Liu
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引用次数: 0

摘要

相对高飞行高度(FH)滑块的加载/卸载(L/UL)过程得到了广泛的研究。俯仰静态姿态(PSA)、横摇静态姿态(RSA)、L/UL速度、磁盘RPM、悬架限位器和滑块气轴承面(ABS)设计是影响L/UL性能的重要因素。随着面密度的快速增加,不可避免地要求滑块在5 nm以下飞行。在如此低的跳频下,安全升/升滑块是一个很大的挑战。然而,目前对超低跳频滑块的安全L/UL的L/UL工艺和滑块设计策略的研究还很少。本文研究了滑块制造过程中垂直L/UL速度、磁盘RPM、PSA和RSA克载荷、滑块冠/弧度和掩模移位对亚5nm跳频滑块L/UL性能的影响。在此基础上,提出了提高L/UL性能的设计准则,并对其有效性进行了验证。
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Load/unload processes for sub-5-nm flying height sliders
The load/unload (L/UL) processes of relatively high flying height (FH) sliders have been studied extensively. The pitch static attitude (PSA), roll static attitude (RSA), L/UL velocities, disk RPM, suspension limiter, and slider air-bearing surface (ABS) design are important factors that can affect the L/UL performance significantly. It is inevitable that sliders are required to fly below 5 nm with the rapid increase in areal density. At such a low FH, it is a big challenge to L/UL a slider safely. However, L/UL process and slider design strategy for a safe L/UL of ultra-low FH sliders are seldom studied so far. In this paper, the effects of vertical L/UL velocities, disk RPM, PSA and RSA gram load, slider crown/camber and mask shifting in the slider manufacturing process on the L/UL performance of a sub-5-nm FH slider are studied. Then, a design guideline for better L/UL performance is proposed and its effectiveness is verified.
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