颗粒形状对激光-污染物相互作用对1ω高反射镜涂层防护盖层损伤的影响

S. Qiu, M. Norton, J. Honig, A. Rubenchik, C. Boley, A. Rigatti, C. Stolz, M. Matthews
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引用次数: 1

摘要

我们报道了在不同形状的Ti颗粒存在下,1ω (1053 nm)高反射镜涂层保护盖层对激光照射的响应。我们考虑了两种候选盖层材料,即SiO2和Al2O3。它们被涂在多个硅-铪多层涂层上。每个样品暴露在1053 nm激光束(p偏振,影响~ 10 J/cm2,脉冲长度14 ns)的单次倾斜(45°)照射下,表面存在球形或不规则形状的Ti颗粒。我们观察到两个盖层表现出明显不同的响应。对于球形颗粒,Al2O3封盖层损伤严重,封盖层在颗粒位置完全分层。相比之下,由于等离子体侵蚀,SiO2封盖层仅受到浅层凹陷的轻微影响。对于形状不规则的钛屑,Al2O3覆盖层几乎没有损伤,而SiO2覆盖层损伤明显。在球形颗粒的情况下,我们将封盖层的不同响应归因于材料的热膨胀系数差异很大,其中Al2O3的热膨胀系数约为SiO2的15倍。对于不规则形状的屑,我们将损伤响应的差异归因于两种材料之间的机械韧性差异很大,其中Al2O3的机械韧性比SiO2强约10倍。
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Impact of particle shape on the laser-contaminant interaction induced damage on the protective capping layer of 1ω high reflector mirror coatings
We report an investigation on the response to laser exposure of a protective capping layer of 1ω (1053 nm) high-reflector mirror coatings, in the presence of differently shaped Ti particles. We consider two candidate capping layer materials, namely SiO2 and Al2O3. They are coated over multiple silica-hafnia multilayer coatings. Each sample is exposed to a single oblique (45°) shot of a 1053 nm laser beam (p polarization, fluence ~ 10 J/cm2, pulse length 14 ns), in the presence of spherically or irregularly shaped Ti particles on the surface. We observe that the two capping layers show markedly different responses. For spherically shaped particles, the Al2O3 cap layer exhibits severe damage, with the capping layer becoming completely delaminated at the particle locations. In contrast, the SiO2 capping layer is only mildly modified by a shallow depression, likely due to plasma erosion. For irregularly shaped Ti filings, the Al2O3 capping layer displays minimal to no damage while the SiO2 capping layer is significantly damaged. In the case of the spherical particles, we attribute the different response of the capping layer to the large difference in thermal expansion coefficient of the materials, with that of the Al2O3 about 15 times greater than that of the SiO2 layer. For the irregularly shaped filings, we attribute the difference in damage response to the large difference in mechanical toughness between the two materials, with that of the Al2O3 being about 10 times stronger than that of the SiO2.
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Impact of particle shape on the laser-contaminant interaction induced damage on the protective capping layer of 1ω high reflector mirror coatings Direct comparison of statistical damage frequency method and raster scan procedure Refined metrology of spatio-temporal dynamics of nanosecond laser pulses Characterization of damage precursor density from laser damage probability measurements with non-Gaussian beams Direct absorption measurements in thin rods and optical fibers
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