K. Saito, T. Kondo, A. Nakaoki, M. Sasaura, K. Fujura
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High Numerical Aperture Hemisphere Solid Immersion Lens made of KTaO3 with Wide Thickness Tolerance
The hemisphere SIL that had a wide thickness tolerance was developed. The optics of NA 1.84 with hemisphere SIL of KTaO3 was designed and the same playback performance as that of super-hemisphere SIL was confirmed