介质薄膜在低相干光纤法布里-普氏干涉仪中的应用:比较研究

M. Hirsch, P. Wierzba, M. Jędrzejewska-Szczerska
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引用次数: 2

摘要

我们研究了通过原子层沉积(ALD)沉积的选定的薄介质薄膜在用于传感应用的低相干光纤法布里-帕姆罗干涉仪中的应用。这种薄膜可以沉积在单模光纤(SMF-28)的端面上,以改变法布里-帕姆罗特腔的反射率,保护光纤免受侵蚀环境的影响,或创建多腔干涉测量传感器。计算了氧化锌(ZnO)、二氧化钛(TiO2)、氧化铝(Al2O3)和氮化硼(BN)薄膜在不同厚度下的光谱反射率,并进行了比较。结果表明,虽然Al2O3也适用于光纤法布里-帕氏干涉仪,但TiO2和ZnO是最有希望用于光纤法布里-帕氏干涉仪的材料。
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Application of thin dielectric films in low coherence fiber-optic Fabry-Pérot sensing interferometers: comparative study
We examine the application of selected thin dielectric films, deposited by atomic layer deposition (ALD), in a low coherence fiber-optic Fabry-Pérot interferometer designed for sensing applications. Such films can be deposited on the end-face of a single mode optical fiber (SMF-28) in order to modify the reflectivity of the Fabry-Pérot cavity, to provide protection of the fibers from aggressive environments or to create a multi-cavity interferometric sensor. Spectral reflectance of films made from zinc oxide (ZnO), titanium dioxide (TiO2), aluminum oxide (Al2O3) and boron nitride (BN) was calculated for various thickness of the films and compared. The results show that the most promising materials for use in fiber-optic Fabry-Pérot interferometer are TiO2 and ZnO, although Al2O3 is also suitable for this application.
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