具有高击穿电压和低反馈电容的假门控射频VDMOSFET

Shuming Xu, C. Ren, P. Foo, Y. Liu, Yi Su
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引用次数: 11

摘要

本文提出了一种新型的射频功率器件——虚门控VDMOS,并进行了实验验证。新器件采用标准RF VDMOS工艺技术生产。击穿电压提高了20%,而反馈电容C/sub / rss/降低了三分之一,从而实现了理想的高频性能和高可靠性。
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Dummy gated radio frequency VDMOSFET with high breakdown voltage and low feedback capacitance
In this paper, a novel radio frequency power device called dummy gated VDMOS has been proposed and demonstrated experimentally. The new device is produced using the standard RF VDMOS process technology. An improvement in breakdown voltage by 20% is realized, while the feedback capacitance C/sub rss/ is reduced by three times leading to a desired HF performance and high reliability.
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