整个半导体工厂的CIM系统

IEEE/SEMI International Symposium on Semiconductor Manufacturing Science Pub Date : 1990-05-21 DOI:10.1109/ISMSS.1990.66124

Y. Mizokami

{"title":"整个半导体工厂的CIM系统","authors":"Y. Mizokami","doi":"10.1109/ISMSS.1990.66124","DOIUrl":null,"url":null,"abstract":"A CIM (computer-integrated manufacturing) system implemented in a plant for memory-device production is described. It is noted that application of this system is making it possible to prevent operational error, to reduce manpower, and to improve quality control. After the installation of an ultraclean process, a high-yield VLSI plant with fewer operators was realized.<<ETX>>","PeriodicalId":398535,"journal":{"name":"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"The total CIM system for semiconductor plants\",\"authors\":\"Y. Mizokami\",\"doi\":\"10.1109/ISMSS.1990.66124\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A CIM (computer-integrated manufacturing) system implemented in a plant for memory-device production is described. It is noted that application of this system is making it possible to prevent operational error, to reduce manpower, and to improve quality control. After the installation of an ultraclean process, a high-yield VLSI plant with fewer operators was realized.<<ETX>>\",\"PeriodicalId\":398535,\"journal\":{\"name\":\"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science\",\"volume\":\"38 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISMSS.1990.66124\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISMSS.1990.66124","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

介绍了一种用于存储设备生产的CIM(计算机集成制造)系统。该系统的应用使防止操作错误、减少人力和改进质量控制成为可能。在安装超净工艺后，实现了操作人员较少的高产率VLSI工厂。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The total CIM system for semiconductor plants

A CIM (computer-integrated manufacturing) system implemented in a plant for memory-device production is described. It is noted that application of this system is making it possible to prevent operational error, to reduce manpower, and to improve quality control. After the installation of an ultraclean process, a high-yield VLSI plant with fewer operators was realized.<>

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IEEE/SEMI International Symposium on Semiconductor Manufacturing Science

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