薄膜电极微型Coulter计数器的设计与制造

Si-Yang Zheng, Y. Tai
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引用次数: 5

摘要

本文报道了一种用薄膜电极制备微型库尔特计数器的新方法。传统的Coulter计数器测量直流电阻的变化,以检测粒子通过两个流室之间的孔径。使器件小型化的最大挑战之一是克服所遇到的大电阻。我们提出了一种利用微米尺度的金属薄膜电极进行传感的新方法。提高了分辨率,便于系统集成。基于这种方法建立了一个设备并进行了测试
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Design and Fabrication of a Micro Coulter Counter with Thin Film Electrodes
We report a new approach for micro Coulter counter with thin film electrodes. Traditional Coulter counter measures DC resistance change to sense particles passing through an aperture between two flow chambers. One of the biggest challenges to miniaturize the device is to overcome the large resistance encountered. We propose a new approach to use thin film metal electrodes in micron size range for sensing. Resolution can be improved and it's easy for system integration. A device based on this approach was built and tested
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