{"title":"基于CMOS时间压缩电荷注入的SOI像素探测器","authors":"D. Durini, W. Brockherde, B. Hosticka","doi":"10.1109/ECCTD.2007.4529754","DOIUrl":null,"url":null,"abstract":"Concept and experimental results obtained from a pixel detector based on CMOS time-compression charge- injection-devices (TC-CID) with a huge internal photocurrent amplification (-104), fabricated in CMOS silicon-on-insulator (SOI) technology are presented. Here, the readout circuitry is fabricated on highly-doped, 200 nm thick SOI film, while the photogate (PG) detector is fabricated on higher-resistivity handle wafer. The latter, together with the 30 V biasing possibilities enhances the quantum efficiency, especially for irradiations with wavelengths in the near-infra-red (NIR) part of the spectra.","PeriodicalId":445822,"journal":{"name":"2007 18th European Conference on Circuit Theory and Design","volume":"113 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"SOI pixel detector based on CMOS time-compression charge-injection\",\"authors\":\"D. Durini, W. Brockherde, B. Hosticka\",\"doi\":\"10.1109/ECCTD.2007.4529754\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Concept and experimental results obtained from a pixel detector based on CMOS time-compression charge- injection-devices (TC-CID) with a huge internal photocurrent amplification (-104), fabricated in CMOS silicon-on-insulator (SOI) technology are presented. Here, the readout circuitry is fabricated on highly-doped, 200 nm thick SOI film, while the photogate (PG) detector is fabricated on higher-resistivity handle wafer. The latter, together with the 30 V biasing possibilities enhances the quantum efficiency, especially for irradiations with wavelengths in the near-infra-red (NIR) part of the spectra.\",\"PeriodicalId\":445822,\"journal\":{\"name\":\"2007 18th European Conference on Circuit Theory and Design\",\"volume\":\"113 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 18th European Conference on Circuit Theory and Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ECCTD.2007.4529754\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 18th European Conference on Circuit Theory and Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ECCTD.2007.4529754","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
SOI pixel detector based on CMOS time-compression charge-injection
Concept and experimental results obtained from a pixel detector based on CMOS time-compression charge- injection-devices (TC-CID) with a huge internal photocurrent amplification (-104), fabricated in CMOS silicon-on-insulator (SOI) technology are presented. Here, the readout circuitry is fabricated on highly-doped, 200 nm thick SOI film, while the photogate (PG) detector is fabricated on higher-resistivity handle wafer. The latter, together with the 30 V biasing possibilities enhances the quantum efficiency, especially for irradiations with wavelengths in the near-infra-red (NIR) part of the spectra.