A. Kachouane, N. Fellahi, M. Addou, M. A. Lamrani, T. El Habbani, Z. Sofiani, M. El Jouad, K. Bahedi, L. Dghoughi, B. Sahraoui, N. Gaumer, A. Monteil
{"title":"衬底温度对喷雾热解制备ITO薄膜阴极发光性能的影响","authors":"A. Kachouane, N. Fellahi, M. Addou, M. A. Lamrani, T. El Habbani, Z. Sofiani, M. El Jouad, K. Bahedi, L. Dghoughi, B. Sahraoui, N. Gaumer, A. Monteil","doi":"10.1109/ICTONMW.2007.4446958","DOIUrl":null,"url":null,"abstract":"Highly conducting and transparent tin-doped indium oxide (ITO) thin films were deposited on glass substrates by spray pyrolysis. The characterisation of ITO thin films prepared under different deposition parameters is investigated. The transmission, resistivity and luminescence of the films were found to be strongly dependent on these parameters. The films prepared at the optimum conditions exhibit low resistivity and optical transmission larger than 90% in the visible region. ITO cathodoluminescence films prepared at 450degC and 500degC has been studied. These samples exhibit a strong luminescence peaks in visible region at 460 nm and 650 nm.","PeriodicalId":366170,"journal":{"name":"2007 ICTON Mediterranean Winter Conference","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Effect of substrate temperature on cathodoluminescence of ITO thin films prepared by spray pyrolysis\",\"authors\":\"A. Kachouane, N. Fellahi, M. Addou, M. A. Lamrani, T. El Habbani, Z. Sofiani, M. El Jouad, K. Bahedi, L. Dghoughi, B. Sahraoui, N. Gaumer, A. Monteil\",\"doi\":\"10.1109/ICTONMW.2007.4446958\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Highly conducting and transparent tin-doped indium oxide (ITO) thin films were deposited on glass substrates by spray pyrolysis. The characterisation of ITO thin films prepared under different deposition parameters is investigated. The transmission, resistivity and luminescence of the films were found to be strongly dependent on these parameters. The films prepared at the optimum conditions exhibit low resistivity and optical transmission larger than 90% in the visible region. ITO cathodoluminescence films prepared at 450degC and 500degC has been studied. These samples exhibit a strong luminescence peaks in visible region at 460 nm and 650 nm.\",\"PeriodicalId\":366170,\"journal\":{\"name\":\"2007 ICTON Mediterranean Winter Conference\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 ICTON Mediterranean Winter Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICTONMW.2007.4446958\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 ICTON Mediterranean Winter Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICTONMW.2007.4446958","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of substrate temperature on cathodoluminescence of ITO thin films prepared by spray pyrolysis
Highly conducting and transparent tin-doped indium oxide (ITO) thin films were deposited on glass substrates by spray pyrolysis. The characterisation of ITO thin films prepared under different deposition parameters is investigated. The transmission, resistivity and luminescence of the films were found to be strongly dependent on these parameters. The films prepared at the optimum conditions exhibit low resistivity and optical transmission larger than 90% in the visible region. ITO cathodoluminescence films prepared at 450degC and 500degC has been studied. These samples exhibit a strong luminescence peaks in visible region at 460 nm and 650 nm.
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