压电谐振位移传感器

M. Umapathy, Y. Sujan, K. Suresh
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引用次数: 5

摘要

本文介绍了一种谐振式位移传感器的设计与研制。该传感器采用悬臂梁作为谐振腔,采用压电激励和闭环电子传感。该传感器测量的未知位移在测量范围内具有良好的线性度。输入位移通过固定的滚子装置改变谐振器的长度。由位移变化引起的共振频率的变化是由闭环电子元件检测到的。
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Piezoelectric based resonance displacement sensor
The paper presents design and development of a resonance displacement sensor. The sensor is built with cantilever as a resonator with piezoelectric excitation and sensing in closed loop electronics. The sensor measures the unknown displacement with good linearity within the measurement range. The input displacement varies the length of the resonator by a fixed roller arrangement. The shift in resonance frequency for a change in displacement is detected by closed loop electronics.
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