一种新型四指传感CMOS MEMS加速度计

2006 5th IEEE Conference on Sensors Pub Date : 2006-10-01 DOI:10.1109/ICSENS.2007.355822

Chih-Mimg Sun, Chuanwei Wang, D. Liu, M.S.-C. Lu, W. Fang, Chao-Jui Liang, H. Hsieh, T. Shing

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引用次数: 2

摘要

本研究提出了一种具有四指传感阵列的新型CMOS加速度计。此外，额外的弹簧也用于电气布线。传感电容提高了80%，但检测质量降低了20%。因此，目前的加速度计的灵敏度仍然提高了近44%。测量结果表明，该加速度计的增益为2.94 mV/g。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Novel CMOS MEMS Accelerometer with Four Sensing Finger Arrays

This study presents a novel CMOS accelerometer with four sensing finger arrays. Moreover, additional springs are also employed for electrical routing. The sensing capacitance is increased for 80%, at the cost of the decreasing of proof mass for 20%. Thus, the sensitivity of the present accelerometer is still increased for near 44%. The measurement results show that the present accelerometer has a gain of 2.94 mV/g.

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2006 5th IEEE Conference on Sensors

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