{"title":"玻璃光波导的制备技术","authors":"N. L. Orlikov, L. Orlikov, S. Shandarov","doi":"10.1109/SIBCON.2007.371318","DOIUrl":null,"url":null,"abstract":"Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals, is considered. A waveguide is prepared by formation of a film of lead oxide using standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.","PeriodicalId":184476,"journal":{"name":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","volume":"76 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication technology of optical waveguides on glasses\",\"authors\":\"N. L. Orlikov, L. Orlikov, S. Shandarov\",\"doi\":\"10.1109/SIBCON.2007.371318\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals, is considered. A waveguide is prepared by formation of a film of lead oxide using standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.\",\"PeriodicalId\":184476,\"journal\":{\"name\":\"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat\",\"volume\":\"76 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-04-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SIBCON.2007.371318\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIBCON.2007.371318","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication technology of optical waveguides on glasses
Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals, is considered. A waveguide is prepared by formation of a film of lead oxide using standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.
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