电力电子模块制造中功率半导体质量评定的热成像检验方法

M. Schaulin, M. Oppermann, T. Zerna
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引用次数: 5

摘要

近年来,电力电子产品的市场规模稳步增长,创新的封装技术有助于发展。提高生产率和盈利能力的要求要求不断改进生产过程。需要新的或补充的内联诊断解决方案,并应符合当前和未来的质量、可靠性和成本效益要求。在现代电力电子组件的质量测试中,功率半导体与衬底之间的连接是一个挑战。目前,该结的过程控制主要基于x射线检查,但热成像似乎是一种很有前途的方法。它工作无接触,速度快,可以确定封装的热性能。
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Thermographic inspection method for quality assessment of power semiconductors in the manufacture of power electronics modules
In recent years, the market volume for power electronics has grown steadily and the development was assisted by innovative packaging technologies. Increased productivity and profitability requirements demand continuous improvement of production processes. New or complementary solutions for inline-capable diagnostics are required and should comply with the quality, reliability and cost-effectiveness requirements of the present and the future. In the quality testing of modern power electronic assemblies, the junction between power semiconductor and substrate is a challenge. Today, process control of this junction is mainly based on X-ray inspection, but thermography seems to be a promising approach. It works contact-free, fast and can determine the thermal properties of the package.
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