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2018 7th Electronic System-Integration Technology Conference (ESTC)最新文献

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Wafer Level Through Polymer Optical Vias (TPOV) Enabling High Throughput of Optical Windows Manufacturing 晶圆级聚合物光学通孔(TPOV)实现光学窗制造的高吞吐量
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654379
Z. Huang, R. Poelma, S. Vollebregt, M. H. Koelink, E. Boschman, R. Kropf, M. Gallouch, G.Q. Zhang
This article shows the fabrication process and packaging of through polymer optical vias (TPOV). The TPOV enables encapsulation and packaging of silicon photonic systems using film assisted molding (FAM) and the creation of micron-sized through polymer optical vias. The optical vias are lithographically defined in thick film photo-resist (∼ 300 μm) and parallel processed on substrate level. Placing and connecting optical windows on individual chips using pick & place is a difficult and time-consuming process because of the stringent requirements on alignment accuracy, cost and throughput. In this work we provide a solution to this problem by combining microfabrication technology with back-end film assisted molding technology for a new packaging approach for the integration of optical windows. As feasibility study we show through polymer optical windows on optical encoder Si photodiode arrays. The resulting microstructures are transparent in the spectrum of interest and hence serve as optical windows towards the substrate. Furthermore, our results show that the high aspect ratio (5:1) micro structure windows can be achieved and protected using FAM-technology. The optical through package windows are accurately defined (±5 μm accuracy due to mask limitations) and can significantly improve the throughput. The total process time of a single wafer with up to 1260 chips and 20160 windows, including lamination, exposure and development, would approximately take 1-1.5 hours.
介绍了聚合物光学通孔(TPOV)的制备工艺和封装方法。TPOV能够使用薄膜辅助成型(FAM)封装和封装硅光子系统,并创建微米尺寸的聚合物光学通孔。光学通孔在厚膜光刻胶(~ 300 μm)上进行光刻定义,并在衬底水平上进行平行加工。由于对校准精度,成本和吞吐量的严格要求,使用拾取和放置在单个芯片上放置和连接光学窗口是一个困难且耗时的过程。在这项工作中,我们通过将微加工技术与后端薄膜辅助成型技术相结合,为集成光学窗口提供了一种新的包装方法,从而解决了这个问题。作为可行性研究,我们展示了通过聚合物光学窗口的光学编码器硅光电二极管阵列。由此产生的微结构在感兴趣的光谱中是透明的,因此可以作为对基材的光学窗口。此外,我们的研究结果表明,采用fam技术可以实现和保护高纵横比(5:1)的微结构窗口。光学通过封装窗口精确定义(由于掩模限制,精度为±5 μm),可以显着提高吞吐量。包含多达1260个芯片和20160个窗口的单个晶圆的总工艺时间,包括层压,曝光和显影,大约需要1-1.5小时。
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引用次数: 0
surface treatment of gold bumps for thermocompression bonding with low temperature 低温热压粘接用金疙瘩的表面处理
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546419
Juliane Föhlich, L. Dietrich, H. Oppermann, K. Lang
Trials were made for thermocompression bonding of gold contacts with different geometries. Prior to bonding, the surfaces were mechanically planarized and activated by means of an atmospheric plasma. These treatments enabled excellent shear strengths (about 50MPa) after bonding at a temperature of 160°C and a pressure of 100 MPa for short bond times (10s).
对不同几何形状的金触点进行了热压键合试验。在粘合之前,表面被机械平面化,并通过大气等离子体激活。这些处理在160°C的温度和100 MPa的压力下,在短时间(10s)的粘合下,获得了优异的剪切强度(约50MPa)。
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引用次数: 3
FO-WLP multi-DOF inertial sensor for automotive applications 汽车用FO-WLP多自由度惯性传感器
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546447
H. Kuisma, A. Cardoso, Nikolai Mäntyoja, Rüdiger Rosenkrantz, S. Nurmi, M. Gall
Fan-out wafer level packaging (FO-WLP) is the fastest growing packaging technology. Besides providing greater number of IOs than could be obtained by fan-in wafer level packaging (WLP) it also offers interesting opportunities for multi-die packaging with minimum package dimensions. Combined inertial sensor is an established category of automotive sensor components. with of two or more MEMS sensor dies for 36 axis motion measurement and an interface circuit die. It is used for electronic chassis stability control (ESC) and for advanced driver assistant systems (ADAS). Currently the sensor is packaged in various standard or proprietary configurations: ceramic cavity packages, pre-molded plastic cavity packages, over-molded SOIC, PBGA. The demand is towards smaller foot print and smaller height, lower cost and better robustness to vibrations. FO-WLP offers some excellent characteristics like small size, compatible cost, vibration robustness and low stress to sensitive MEMS dies. Present work shows that it will also reach automotive reliability requirements and pass high temperature, thermal cycle and temperature-humidity tests. Three fracture mechanism of the solder ball IOs were identified at 2000 thermal cycles. Solder fatigue was no issue and by design changes two other mechanisms can be corrected. Two-fold redundancy will make an IO failure rate low enough. EMI and internal cross-talk protection was found better than with existing devices. Reversible humidity dependence due to moisture absorption by polyimide film was seen and a lay-out change was implemented to overcome it.
扇出晶圆级封装(FO-WLP)是发展最快的封装技术。除了提供比扇入晶圆级封装(WLP)更多的io外,它还为最小封装尺寸的多模封装提供了有趣的机会。组合式惯性传感器是一类成熟的汽车传感器部件。具有两个或多个用于36轴运动测量的MEMS传感器模具和一个接口电路模具。它用于电子底盘稳定控制(ESC)和高级驾驶员辅助系统(ADAS)。目前,传感器封装在各种标准或专有配置中:陶瓷腔封装,预模压塑料腔封装,过度模压SOIC, PBGA。需求是更小的占地面积和更小的高度,更低的成本和更好的振动稳健性。FO-WLP具有体积小、成本兼容、振动稳健性强、对敏感MEMS模具应力低等优良特性。目前的工作表明,它也将达到汽车可靠性要求,并通过高温、热循环和温湿度测试。在2000次热循环下,确定了焊料球的三种断裂机理。焊料疲劳不是问题,并且通过设计更改可以纠正其他两个机制。双重冗余将使IO故障率足够低。发现电磁干扰和内部串扰保护比现有设备更好。由于聚酰亚胺薄膜吸湿,可逆的湿度依赖性被发现,并实施了布局改变来克服它。
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引用次数: 3
Wire Bonding of Surface Acoustic Wave (SAW) Sensors for High Temperature Applications 用于高温应用的表面声波(SAW)传感器的金属丝键合
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546491
D. Ernst, E. Brachmann, S. Menzel, K. Bock
SAW sensors are very suitable for high temperature applications up to 1,000 °C or higher. In this work CTGS substrates were used as test sample material. To realize a sensor setup an interdigital transducer (IDT) is necessary and deposited onto the surface of CTGS. In the present work thin film deposited tungsten molybdenum (WMo) and ruthenium aluminum (RuAl) as functional chip metallization will be investigated. For electrical interconnecting of sensor dies wire bonding is the dominant technology in general. Therefore, wire bonding is also the first choice to interconnect SAW sensors. Typical wire bonding materials are Copper, Gold or Aluminum (respectively AlSi1). With regard to high temperature applications up to 1,000 °C these materials have an unsuitable melting point. With regard to reliability the homologous temperature T/Tm should be less than 0.5 i.e. the melting point of the bonding wire has to be at least around 2,275 °C. In [1] Wolfram (TS =3,422 °C) is described as suitable wire material, but it is not common for wire bonding at present. Platinum (TS =1,768 °C) is the best fitting material which is available as adequate bonding wires at the market and already approved by wire bonding. So it is possible to use this material at least up to 748 °C for a homologous temperature of below 0.5. Another critical point besides the wire material is the chip metallization of the IDT and the antenna of the wireless SAW sensors. To reduce the thermoelectric effects at high temperatures and to improve the wire bonding process, platinum finish metallization are being investigated for both, CTGS and antenna on ceramic. For chip metallization thin film technology is used. For antenna either the thin film technology or the thick film technology can be used, while thick film technology is standard for this application. However, a combination of both technologies is applied in this paper to reach best results. Ultrasonic and Thermosonic wire bonding is also compared as main technologies for connecting the SAW chip to the antenna. In according to the DVS guideline 2811 wire pull and ball shear tests were performed on test samples to evaluate the bond quality. In publication [2] an increasing of pull strength after storage at high temperature is described. Therefore, the manufactured test samples were also stored at 800 °C for 2h and 10 h under high vacuum. The pull and shear test results are better as the initial results as expected.
SAW传感器非常适合高达1000°C或更高的高温应用。本研究以CTGS基板为测试样品材料。为了实现传感器的设置,需要在CTGS表面沉积一个数字间传感器(IDT)。本文研究了钨钼(WMo)和钌铝(RuAl)薄膜沉积作为功能片状金属化的方法。对于传感器模具的电气互连,一般采用线键合技术。因此,线键合也是SAW传感器互连的首选。典型的焊线材料是铜、金或铝(分别为AlSi1)。对于高达1000°C的高温应用,这些材料的熔点不合适。考虑到可靠性,相应温度T/Tm应小于0.5,即焊线的熔点必须至少在2275℃左右。在[1]中,Wolfram (TS =3,422°C)被描述为合适的线材,但目前用于线材粘接并不常见。铂金(TS = 1768°C)是市场上最合适的焊线材料,并且已经通过了焊线的认证。因此,在同源温度低于0.5的情况下,可以使用该材料至少高达748°C。除了导线材料外,另一个关键问题是IDT的芯片金属化和无线SAW传感器的天线。为了减少高温下的热电效应和改善线键合工艺,人们正在研究在陶瓷陶瓷上对CTGS和天线进行铂表面金属化。对于片状金属化,采用薄膜技术。天线既可以采用薄膜技术,也可以采用厚膜技术,而厚膜技术是该应用的标准技术。然而,本文将这两种技术结合使用以达到最佳效果。本文还比较了超声和热声线键合作为SAW芯片与天线连接的主要技术。根据DVS指南2811,对测试样品进行拉丝和球剪试验以评估粘结质量。在出版物[2]中描述了高温储存后拉强度的增加。因此,制造的测试样品也在800°C高真空下保存2h和10h。拉剪试验结果与初步试验结果一致。
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引用次数: 3
Investigations on the high temperature suitability of diffusion soldered interconnects 扩散焊接互连的高温适用性研究
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546421
C. Schellenberg, Jörg Strogies, K. Wilke, K. Meier
In this study it was found that the HotPowCon-soldered (HPC) interconnections show another kind of ageing effects than comparable assemblies with soldered or silver-sintered joining zones. The formation of vertical cracks can observed but could not be attributed solely to the decrease in volume due to the conversion of remaining solder within the joining zone into intermetallic phases (IMC). Rather, these result from the different coefficients of thermal expansion of the selected joining partners and the joining materials themselves. The occurrence of mechanical stress within the joining zone in combination with the stiff and brittle properties of the IMP promotes the formation of the vertical cracks. In contrast to the ageing effects of soldered or silver-sintered interconnections, the HPC-soldered structures hardly impair their electrical and thermal function.
在这项研究中发现,与具有焊接或银烧结连接区的同类组件相比,hotpowcon焊(HPC)互连显示出另一种老化效应。可以观察到垂直裂纹的形成,但不能仅仅归因于连接区内剩余焊料转化为金属间相(IMC)而导致的体积减小。相反,这是由所选择的连接伙伴和连接材料本身的不同热膨胀系数造成的。接合区内机械应力的产生,加之IMP的硬脆特性,促进了垂直裂纹的形成。与焊接或银烧结互连的老化效应相反,hpc焊接结构几乎不影响其电学和热学功能。
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引用次数: 1
Evaluation of silver and copper sintering of first level interconnects for high power LEDs 大功率led一级互连用银和铜烧结的评价
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546499
Sri Krishna Bhogaraju, A. Hanss, M. Schmid, G. Elger, F. Conti
Silver sintering, well known in power electronic applications, is migrating into optoelectronic assembly, to replace other interconnect materials like the eutectic Au80Sn20 or SnAgCu solder. Sintering offers an interconnect that can be formed at low temperature while at the same time can operate at high temperature. The goal of the research of this paper is to develop a sintered interconnect which can replace traditional AuSn or SnAgCu (SAC) solder, offering low thermal resistance, sufficient shear strength and thermo-mechanical fatigue resistance. Silver offers excellent thermal properties and can be an effective replacement in case of low mechanical stress applications. But copper is in case of applications with high thermo-mechanical stress the material of choice due to its higher yield strength and in general due to lower material cost.Process conditions in case of silver sintering under pressure and pressureless silver sintering have been established. A stable interconnect matching the reference SAC305 solder in terms of mechanical and thermal performance has been realized returning shear strength values averaging 59MPa for silver sintering under pressure and 42MPa for pressureless sintering as against the reference SAC305 solder averaging 56MPa. The thermal performance, measured by transient thermal analysis (TTA) reveal the lower thermal resistance of 0,8K/W and 0,5K/W for silver sintering under pressure and pressureless silver sintering respectively, as against the reference SAC305 solder as expected based on the thermal conductivity of the material. Particles size, binding material, bonding force and bonding atmosphere are shown to have a major impact on the quality of the silver sintered interconnect. Pastes consisting sub-micron and nanoscale silver particles provide less porous interconnect compared to paste containing solely micron sized particles in case of pressureless sintering.A major challenge with regards to copper nano-powder based sintering is to ensure sufficient penetration of the reducing gas during the sintering process. This is observed also in terms of the mechanical (4MPa) as well as the thermal performance. The paste used in the experiments has not sufficient reducing agents. Based on the results strategies to improve the activation need to be developed for the binder chemistry.
银烧结,众所周知的电力电子应用,正在迁移到光电组装,以取代其他互连材料,如共晶Au80Sn20或SnAgCu焊料。烧结提供了一种可以在低温下形成的互连,同时可以在高温下运行。本文的研究目标是开发一种可以取代传统的AuSn或SnAgCu (SAC)焊料的烧结互连,具有低热阻,足够的剪切强度和热机械抗疲劳性。银具有优异的热性能,在低机械应力应用的情况下可以成为有效的替代品。但由于铜具有较高的屈服强度和较低的材料成本,因此在具有高热机械应力的应用中,铜是首选材料。建立了银有压烧结和无压烧结的工艺条件。在机械和热性能方面,与参考SAC305焊料匹配的稳定互连已经实现,银在有压烧结时的平均抗剪强度为59MPa,无压烧结时的平均抗剪强度为42MPa,而参考SAC305焊料的平均抗剪强度为56MPa。通过瞬态热分析(TTA)测量的热性能显示,与参考SAC305焊料相比,银在有压烧结和无压烧结的热阻分别为0.8 k /W和0.5 k /W,这是基于材料的导热性所期望的。颗粒尺寸、结合材料、结合力和结合气氛对银烧结互连体的质量有重要影响。在无压烧结的情况下,与仅含有微米级颗粒的浆料相比,由亚微米级和纳米级银颗粒组成的浆料提供更少的多孔互连。铜纳米粉烧结的一个主要挑战是在烧结过程中确保还原性气体的充分渗透。在力学(4MPa)和热性能方面也观察到这一点。实验用浆料中还原剂不足。在此基础上,需要制定提高粘合剂化学活性的策略。
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引用次数: 12
Calculation of local solder temperature profiles in reflow ovens 回流炉局部焊料温度分布的计算
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546452
A. Yuile, S. Wiese
This paper presents the application of computational fluid dynamics (CFD) in the area of electronics manufacturing technology. It focuses on the calculation of temperatures within the solder joint during reflow soldering process. The paper shows the advantages of simulation in determining temperatures that are difficult to obtain through experimental methods. Such methods should help to optimise reflow soldering processes in the electronics manufacturing industry.
本文介绍了计算流体力学(CFD)在电子制造技术领域的应用。重点研究了回流焊过程中焊点内温度的计算。本文显示了模拟在确定温度方面的优势,这是通过实验方法难以获得的。这些方法将有助于优化电子制造行业的回流焊工艺。
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引用次数: 3
Control a Joule-Heating Embedded Layer within a Printed Circuit Board 控制印刷电路板内的焦耳加热嵌入层
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546505
Arne Neiser, D. Seehase, Philipp Koschorrek, A. Reinhardt
For a reflow soldering process the most energy consumption is used to heat up the machine itself. If it would be possible to heat up only the solder pins to the required temperature the energy reduction will be significant. The idea behind such a process is to use a conductive heating material layer inside the printed circuit board (PCB). To generate the joule heating, it is necessary to have an electric current flow inside the heating material. This flow must be controlled, because the heating layer is a carbon-based material and can change its resistance as a function of the temperature. In this paper an experimental setup will be described, to realize a control circuit for the heating layer. First only to compensate the resistance change based on the temperature. Second a control circuit to adjust the current flow for different structures or even variable connections for each product.
对于回流焊接工艺,最大的能量消耗是用于加热机器本身。如果有可能仅将焊接引脚加热到所需的温度,则能量减少将是显着的。这种工艺背后的想法是在印刷电路板(PCB)内部使用导电加热材料层。为了产生焦耳加热,必须在加热材料内部有电流流动。这种流动必须加以控制,因为加热层是一种碳基材料,它的电阻会随着温度的变化而变化。本文将描述一个实验装置,以实现加热层的控制电路。首先只补偿基于温度的电阻变化。第二个控制电路,以调整电流的不同结构,甚至可变连接为每个产品。
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引用次数: 1
Power Electronic Assemblies on Printed Wiring Boards Mounted by Silver Sintering 银烧结技术安装在印刷线路板上的电力电子组件
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546334
A. Schiffmacher, Lorenz Litzenberger, J. Wilde, V. Polezhaev, T. Huesgen
The increasing demands on power electronics with high currents and high operating temperatures has led to the establishment of ceramic substrates. More efficient heat distribution, as well as increased thermal durability, are two aspects of the superior properties of ceramic substrates compared to conventional Printed Wiring Boards (PWB). Nevertheless, there is an demand to develop new solutions based on PWBs to provide affordable and highly integrated power electronic devices for electromobility. For cost optimization, it would be advantageous to replace the hybrid technology with a single board in order to reduce materials, parts and interconnections. Unfortunately, mounting techniques like pressure-assisted silver sintering lead to damages of epoxy-glass-substrates due to high bonding pressures and high temperatures during bonding. Recent projects led to the development of high-temperature stable benzoxazin-based wiring boards. Investigations on the quality and reliability of sintered assemblies on these PWB-substrates are still pending and were systematically carried out in this work.
对高电流和高工作温度的电力电子器件日益增长的需求导致了陶瓷基板的建立。与传统的印刷线路板(PWB)相比,更有效的热分配以及增加的热耐久性是陶瓷基板优越性能的两个方面。尽管如此,仍然需要开发基于pcb的新解决方案,为电动汽车提供价格合理且高度集成的电力电子设备。为了优化成本,用单板代替混合技术将是有利的,以减少材料、零件和互连。不幸的是,像压力辅助银烧结这样的安装技术,由于在键合过程中的高键合压力和高温,导致环氧玻璃基板的损坏。最近的项目导致高温稳定的苯并恶嗪基线路板的发展。对这些压铸板上烧结组件的质量和可靠性的研究仍在进行中,并在本工作中进行了系统的研究。
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引用次数: 1
Printed thick copper films for power applications 用于电力应用的印刷厚铜薄膜
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546478
J. Řeboun, J. Hlina, R. Soukup, J. Johan
This paper presents a research focused on development of a new technology for the realization of substrates for power applications such as LED and power modules or CPV receivers. Power electronics puts high demands on substrates and electrical interconnections in terms of high current density in conductors and high dielectric strength and thermal conductivity of insulators. New thick printed copper technology is a selective additive manufacturing process that brings the benefits of material savings and production no chemical waste. It also brings significantly higher pattern resolution (down to 100 $mu$ m line/gap) than conventional DBC technology, possibility to realize step & relief thickness profile, Cu plated vias and multilayer circuits capability. Thick printed copper films show sufficient adhesion to alumina and aluminium nitride substrates and have an excellent resistance to thermal shock cycling.
本文介绍了一项研究,重点是开发一种新技术,用于实现电源应用(如LED和电源模块或CPV接收器)的基板。电力电子在导体中的高电流密度和绝缘体的高介电强度和导热性方面对基板和电气互连提出了很高的要求。新的厚印铜技术是一种选择性增材制造工艺,带来了节约材料和生产无化学废物的好处。它还带来了比传统DBC技术更高的模式分辨率(低至100 $mu$ m线/间隙),实现阶跃和凸出厚度轮廓的可能性,镀铜过孔和多层电路能力。厚印刷铜膜显示出足够的附着力氧化铝和氮化铝基材,并具有优异的耐热冲击循环。
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引用次数: 6
期刊
2018 7th Electronic System-Integration Technology Conference (ESTC)
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