不同方法沉积Ta2O5-SiO2多层膜激光损伤阈值及光学特性的比较研究

SPIE Laser Damage Pub Date : 2015-11-23 DOI:10.1117/12.2194084

R. Botha, Silvia Schwyn Thöny, M. Größl, S. Mourad, C. Maissen, J. I. Venter, T. Südmeyer, M. Hoffmann, P. Bulkin, Sabine Linz-Dittrich, D. Bischof, M. Michler, S. Rinner, A. Ettemeyer

{"title":"不同方法沉积Ta2O5-SiO2多层膜激光损伤阈值及光学特性的比较研究","authors":"R. Botha, Silvia Schwyn Thöny, M. Größl, S. Mourad, C. Maissen, J. I. Venter, T. Südmeyer, M. Hoffmann, P. Bulkin, Sabine Linz-Dittrich, D. Bischof, M. Michler, S. Rinner, A. Ettemeyer","doi":"10.1117/12.2194084","DOIUrl":null,"url":null,"abstract":"Manufacturing processes from the private and academic sectors were used to deposit anti-reflective and high-reflective coatings composed of Ta2O5 - SiO2 multilayers. Used deposition techniques included three Ion Assisted Deposition (IAD) systems and an Ion Beam Sputtering (IBS) system. Coatings were performed on fused silica (Corning 7980) substrates polished by two different suppliers. LIDT Measurements were performed using a Q-Switched Nd:YAG laser operating at 1064nm. The paper presents a comparison of the coatings in terms of laser damage threshold values, optical properties and surface quality.","PeriodicalId":204978,"journal":{"name":"SPIE Laser Damage","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Comparative study of the laser damage threshold and optical characteristics of Ta2O5-SiO2 multilayers deposited using various methods\",\"authors\":\"R. Botha, Silvia Schwyn Thöny, M. Größl, S. Mourad, C. Maissen, J. I. Venter, T. Südmeyer, M. Hoffmann, P. Bulkin, Sabine Linz-Dittrich, D. Bischof, M. Michler, S. Rinner, A. Ettemeyer\",\"doi\":\"10.1117/12.2194084\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Manufacturing processes from the private and academic sectors were used to deposit anti-reflective and high-reflective coatings composed of Ta2O5 - SiO2 multilayers. Used deposition techniques included three Ion Assisted Deposition (IAD) systems and an Ion Beam Sputtering (IBS) system. Coatings were performed on fused silica (Corning 7980) substrates polished by two different suppliers. LIDT Measurements were performed using a Q-Switched Nd:YAG laser operating at 1064nm. The paper presents a comparison of the coatings in terms of laser damage threshold values, optical properties and surface quality.\",\"PeriodicalId\":204978,\"journal\":{\"name\":\"SPIE Laser Damage\",\"volume\":\"42 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-11-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE Laser Damage\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2194084\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Laser Damage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2194084","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

来自私人和学术部门的制造工艺被用于沉积由Ta2O5 - SiO2多层组成的抗反射和高反射涂层。所使用的沉积技术包括三个离子辅助沉积系统和一个离子束溅射系统。涂层是在由两个不同供应商抛光的熔融二氧化硅(康宁7980)基材上进行的。LIDT测量使用调q Nd:YAG激光器，工作波长为1064nm。本文从激光损伤阈值、光学性能和表面质量等方面对两种涂层进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

Comparative study of the laser damage threshold and optical characteristics of Ta2O5-SiO2 multilayers deposited using various methods

Manufacturing processes from the private and academic sectors were used to deposit anti-reflective and high-reflective coatings composed of Ta2O5 - SiO2 multilayers. Used deposition techniques included three Ion Assisted Deposition (IAD) systems and an Ion Beam Sputtering (IBS) system. Coatings were performed on fused silica (Corning 7980) substrates polished by two different suppliers. LIDT Measurements were performed using a Q-Switched Nd:YAG laser operating at 1064nm. The paper presents a comparison of the coatings in terms of laser damage threshold values, optical properties and surface quality.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

SPIE Laser Damage

自引率

0.00%

发文量