193nm离子束溅射氧化涂层的性能增强

H. Blaschke, M. Lappschies, D. Ristau
{"title":"193nm离子束溅射氧化涂层的性能增强","authors":"H. Blaschke, M. Lappschies, D. Ristau","doi":"10.1117/12.752908","DOIUrl":null,"url":null,"abstract":"The utilization of oxide mixtures as layer material for coating design has been transferred to the ion beam sputtering technology and was applied to high-reflecting as well as anti-reflecting components at the wavelength of 193nm. Exclusively, the oxides SiO2 and Al2O3 are candidates for appropriate thin film designs below 200nm. Experimental data received from laser-calorimetric measurements, spectroscopic investigations and laser-induced damage tests are presented for several specimens. With respect to state-of-the-art thin film deposition in the DUV spectral range, conventional quarterwave designs have also been characterized and will be compared to the sputtered mixed oxide coatings.","PeriodicalId":204978,"journal":{"name":"SPIE Laser Damage","volume":"53 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-10-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Performance enhancement of ion beam sputtered oxide coatings for 193 nm\",\"authors\":\"H. Blaschke, M. Lappschies, D. Ristau\",\"doi\":\"10.1117/12.752908\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The utilization of oxide mixtures as layer material for coating design has been transferred to the ion beam sputtering technology and was applied to high-reflecting as well as anti-reflecting components at the wavelength of 193nm. Exclusively, the oxides SiO2 and Al2O3 are candidates for appropriate thin film designs below 200nm. Experimental data received from laser-calorimetric measurements, spectroscopic investigations and laser-induced damage tests are presented for several specimens. With respect to state-of-the-art thin film deposition in the DUV spectral range, conventional quarterwave designs have also been characterized and will be compared to the sputtered mixed oxide coatings.\",\"PeriodicalId\":204978,\"journal\":{\"name\":\"SPIE Laser Damage\",\"volume\":\"53 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-10-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE Laser Damage\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.752908\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Laser Damage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.752908","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

利用氧化物混合物作为涂层设计的层材料已经转移到离子束溅射技术中,并应用于波长为193nm的高反射和抗反射组件。氧化物SiO2和Al2O3是200nm以下合适薄膜设计的候选材料。从激光量热测量,光谱调查和激光诱导损伤测试收到的实验数据提出了几个样品。关于DUV光谱范围内最先进的薄膜沉积,传统的四分之一波设计也已被表征,并将与溅射混合氧化物涂层进行比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Performance enhancement of ion beam sputtered oxide coatings for 193 nm
The utilization of oxide mixtures as layer material for coating design has been transferred to the ion beam sputtering technology and was applied to high-reflecting as well as anti-reflecting components at the wavelength of 193nm. Exclusively, the oxides SiO2 and Al2O3 are candidates for appropriate thin film designs below 200nm. Experimental data received from laser-calorimetric measurements, spectroscopic investigations and laser-induced damage tests are presented for several specimens. With respect to state-of-the-art thin film deposition in the DUV spectral range, conventional quarterwave designs have also been characterized and will be compared to the sputtered mixed oxide coatings.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Impact of particle shape on the laser-contaminant interaction induced damage on the protective capping layer of 1ω high reflector mirror coatings Direct comparison of statistical damage frequency method and raster scan procedure Refined metrology of spatio-temporal dynamics of nanosecond laser pulses Characterization of damage precursor density from laser damage probability measurements with non-Gaussian beams Direct absorption measurements in thin rods and optical fibers
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1