用串联的压电元件对物理传感器的输出电压倍增进行验证

2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI:10.1109/MEMSYS.2018.8346735

K. Kanda, Taiki Ushita, T. Fujita, K. Maenaka

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引用次数: 0

摘要

首次通过实验验证了MEMS结构上串联压电元件的输出电压可以成倍增加而不降低。由于寄生电容的存在，基于压电元件串联的传统器件(压电电压输出传感器)的输出电压出现了下降。采用聚合物而非硅作为结构材料消除了寄生电容，实现了输出电压倍增。

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Validation of output voltage multiplication by using series-connected pizeoelectric elements for physical sensors

For the first time, it is experimentally validated that the output voltage from series-connected piezoelectric elements on MEMS structure can be multiplied without degradation. The output voltage has been degraded for conventional devices (piezoelectric voltage-output sensors) based on the series-connected piezoelectric elements because of parasitic capacitances. The elimination of the parasitic capacitance by using not Si but polymer for structural material achieves output voltage multiplication.

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2018 IEEE Micro Electro Mechanical Systems (MEMS)

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