三维超声计算机断层扫描传感器阵列的半自动封装

M. Angerer, M. Zapf, B. Leyrer, N. Ruiter
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引用次数: 7

摘要

提出了一种用于传感器阵列制造的半自动化封装工艺。作为一项重大创新,换能器圆盘集成在印刷电路板(PCB)和声学匹配层之间的夹层结构中。每个换能器圆盘都包含18根嵌在环氧树脂中的铅锆钛酸盐(PZT)纤维。为了实现传感器阵列组件的互连,采用了胶粘接和自动拾取过程。通过测量装配前后的机电阻抗(EMI),对预串联进行了评价。统计分析表明,在包装前后,串联共振频率和机电耦合频率表现一致。这鼓励了256个阵列的生产。这些阵列现在将集成在超声计算机断层扫描(USCT)系统中,该系统具有用于乳腺癌成像的3D扫描孔径。有了这个系统,我们打算弥合临床使用全3D USCT的差距。
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Semi-Automated Packaging of Transducer Arrays for 3D Ultrasound Computer Tomography
A semi-automated packaging process for transducer array manufacturing is presented. As an major innovation, a transducer disc is integrated in a sandwich structure between a printed circuit board (PCB) and an acoustic matching layer. Each of the transducer discs contains 18 lead-zirconium-titanate (PZT) fibres embedded in epoxy. To interconnect the transducer array components, adhesive bonding and automatic pick-and-place processes were used. A pre-series was evaluated by measuring the electro-mechanical impedance (EMI) before and after the assembly. Statistical analysis showed consistent behaviour of the series resonance fs and the electro-mechanical coupling keff before and after the packaging. This encouraged the manufacturing of 256 arrays. These arrays will now be integrated in an ultrasound computer tomography (USCT) system with 3D scanning aperture for breast cancer imaging. With this system, we intend to bridge the gap towards clinical use of full 3D USCT.
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