Analysis and experiment on the parametrically amplified and push-pull driven resonators

The push-pull driven method for symmetric MEMS resonator is of great efficiency and can suppress the structure asymmetry caused by manufacturing errors. However, the parametric excitation applied to these symmetrical gyroscopes is coincidentally driven by only a single excitation signal to achieve parametric amplification in previous studies, which is inefficient. For theoretical analysis, we find that the valid terms for parametric amplification are eliminated when applied in push-pull driven resonators. Therefore, in order to take advantage of both parametric excitation and push-pull driving, two modified methods are proposed in this paper and have been experimentally demonstrated.