磁悬浮触针测量仪控制电路设计

Jianfei Zhou, Su-ping Chang, Chunbing Hu, Hao Wu, Zhongyu Zhang
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引用次数: 0

摘要

传统的杠杆式测量仪在测量过程中会由于杠杆的转动而引入非线性误差,从而影响测量结果。在此基础上设计了磁悬浮触头测量仪。将杠杆支承方式由触控笔轴改为垂直方向的直线平移,消除了非线性误差,提高了测量精度。介绍了基于磁悬浮轴承触针式表面形貌传感器的测量原理,设计了磁悬浮接触式测量仪的电控系统,最后进行了表面形貌测量试验。实验结果表明,所设计的电控系统能够满足磁悬浮系统的设计要求。
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Control circuit design of magnetic suspension stylus measuring instrument
During the measurement,The traditional lever type measuring instrument will introduce a nonlinear error due to the rotation of the lever, which will affect the measurement result.A magnetic levitation stylus measuring instrument was designed based on it. It changed the lever supporting mode from the stylus shaft to the vertical direction linear translation which can eliminate the nonlinear error and improve the measurement accuracy.This paper introduces the measuring principle based on the magnetic levitation bearing stylus surface topography sensor, designs the electronic control system of the magnetic levitation contact measuring instrument, and finally conducts the surface topography measurement test.The experimental results show that the designed electronic control system can meet the design requirements of the magnetic levitation system.
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