基于mems的近零功率红外无线传感器节点

Vageeswar Rajaram, Z. Qian, Sungho Kang, N. McGruer, M. Rinaldi
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引用次数: 16

摘要

本文报道了一种待机功耗接近零的红外(IR)无线传感器节点(WSN)的首次演示。这里展示的原型采用了等离子体增强的微机械光开关(PMP),利用感兴趣的撞击红外光谱带本身所含的能量来执行被动传感和数字化功能。本研究中展示的手掌大小的红外WSN包括一个真空封装的PMP(红外功率阈值~ 284 nW,光刻定义的红外吸收率:~ 89%,4.6 μm, 0.75 μm带宽),连接到CMOS负载开关,当检测到感兴趣的红外信号时,该开关唤醒硬币电池供电的sub - 1 ghz无线微控制器来传输数据。红外WSN的待机功耗仅为~ 2.6 nW:比最先进的热热电红外WSN提高了1900X,同时提供了集成的光谱选择性。这项工作首次展示了一种off -but- alarm WSN,该WSN仅在存在感兴趣的信号时才会唤醒,当部署到检测不频繁但时间关键的事件时,会产生近乎无限的电池寿命。
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MEMS-based near-zero power infrared wireless sensor node
This paper reports on the first demonstration of an infrared (IR) wireless sensor node (WSN) with near-zero standby power consumption. The prototype presented here employs a plasmonically-enhanced micromechanical photoswitch (PMP) that exploits the energy contained in the impinging IR spectral band of interest itself, to perform passive sensing and digitizing functions. The palm-sized IR WSN demonstrated in this work comprises a vacuum-packaged PMP (IR power threshold ∼284 nW, lithographically-defined IR absorptance: ∼89% at 4.6 μm, 0.75 μm bandwidth) connected to a CMOS load-switch which wakes up a coin battery-powered sub 1-GHz wireless microcontroller to transmit data when the IR signal of interest is detected. The standby power consumption for the IR WSN was measured to be just ∼2.6 nW: a >1900X improvement over state-of-the-art pyroelectric IR WSNs, while offering integrated spectral-selectivity. This work represents the first demonstration of an OFF-but-alert WSN that awakens only in the presence of a signal of interest, resulting in near-unlimited battery-life when deployed to detect infrequent but time-critical events.
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