具有7μg偏置稳定性的模式局域MEMS加速度计

2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-25 DOI:10.1109/MEMSYS.2018.8346719

Milind S. Pandit, Chun Zhao, G. Sobreviela, Arif Mustafazade, X. Zou, A. Seshia

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引用次数: 18

摘要

本文报道了一种模式局域化MEMS加速度计的分辨率、灵敏度和共模抑制指标的实验表征。在30秒的积分时间内，闭环振幅比测量获得了7μg的偏置稳定性，这代表了采用该转导原理开发高稳定性加速度计的重大进展。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A mode-localized MEMS accelerometer with 7μg bias stability

This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.

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2018 IEEE Micro Electro Mechanical Systems (MEMS)

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