AlGaN/GaN hemt的电-热-机械模拟

M. Auf der Maur, G. Romano, A. Di Carlo
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引用次数: 6

摘要

提出了一种完全自一致、耦合的氮基器件电-热-力学模型,并应用于高功率AlGaN/GaN高电子迁移率晶体管(HEMT)。研究了逆压电效应、热应力和自一致耦合对器件静态特性和器件内部应力分布的影响。
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Electro-thermo-mechanical simulation of AlGaN/GaN HEMTs
A fully selfconsistent, coupled electro-thermo-mechanical model for nitride-based devices is presented and applied to a high-power AlGaN/GaN High Electron Mobility Transistor (HEMT). The influence of converse piezoelectric effect, thermal stress and of the selfconsistent coupling on the static device characteristics and on the stress distribution in the device is studied.
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