包覆ZnO纳米线敏感层的石英谐振器氨传感特性

Hongbin Cheng, Lifeng Qin, Fang Li, Qing-Ming Wang
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引用次数: 1

摘要

本文介绍了采用ZnO纳米线作为敏感涂层的基于石英厚度剪切模式(TSM)谐振器的氨气传感器的制备和表征。采用简单的水热合成方法,在石英谐振器上合成了c轴垂直排列的ZnO纳米线阵列。采用x射线衍射(XRD)和扫描电镜(SEM)对ZnO纳米线进行了表征。研究了室温下不同浓度氨气下声波气体传感器的灵敏度、稳定性、重现性和响应时间等传感特性。结果表明,在石英TSM声波谐振器上使用ZnO纳米线阵列,由于其表面/界面反应快、表面/体积比大,可以大大提高灵敏度和传感器响应速度。
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Ammonia sensing characteristics of quartz resonator coated with ZnO nanowires sensitive layer
In this paper, we present our recent study on the fabrication and characterization of ammonia gas sensors based on quartz thickness shear mode (TSM) resonators employing ZnO nanowires as the sensitive coating layer. c-axis vertically aligned ZnO nanowire arrays were synthesized on the quartz resonator through a simple hydrothermal synthesis route. The ZnO nanowires were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The sensing characteristics, including sensitivity, stability, reproducibility, and response time of the acoustic wave gas sensors have been studied under different concentration levels of ammonia at room temperature. It is demonstrated that the use of the ZnO nanowire arrays on quartz TSM acoustic wave resonator can greatly enhance the sensitivity and sensor response speed due to the fast surface/interface reaction and large surface/volume ratio of the nanowire arrays.
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