剩余电阻率模型及其应用

2006 IEEE International Integrated Reliability Workshop Final Report Pub Date : 2006-10-01 DOI:10.1109/IRWS.2006.305227

L. Doyen, X. Federspiel, D. Ney, G. Sers, L. Arnaud, Y. Wouters

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引用次数: 4

摘要

考虑到Matthiessen的规则，我们开发了一个带线尺寸的剩余电阻率模型。所开发的方法可以区分杂质的影响和上浆的影响。因此，我们能够确定与工艺变化相一致的线尺寸。最后，该模型允许对TCR进行可观的评估

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Residual resistivity model and its application

Taking into account Matthiessen's rules, we have developed a model of residual resistivity with line dimensions. The method developed allows distinguishing the effect of impurities and the sizing effect. Thus we are able to determine line dimensions consistent with process variation. Finally this model allows an appreciable evaluation of the TCR

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2006 IEEE International Integrated Reliability Workshop Final Report

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