衍射光学元件的铸造制造

R. Athale, K. Raj
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引用次数: 0

摘要

硅集成电路(MOSIS)采用多项目批量制造来分摊非重复性成本,从而降低原型定制电路的成本。最近在这方面的努力包括通过CO-OP计划批量制造光电器件。在这次演讲中,我们将讨论通过二元光学方法提供衍射光学元件的多项目铸造制造所涉及的问题。将与其他竞争技术进行成本比较。
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Foundry fabrication for diffractive optical elements
Batch fabrication of multiple projects to spread the non-recurring costs and therefore reducing the cost of prototype custom circuits has been carried out for silicon integrated circuits (MOSIS). Recent efforts along this line include batch fabrication of optoelectronic devices through the CO-OP program. In this talk, we will discuss issues involved in providing multi-project foundry fabrication of diffractive optical elements through the binary optics approach. Cost comparison with other competing technologies will be made.
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Study of the resonant behavior of waveguide-gratings Increasing the angular tolerance of guided-mode filters Perturbation theory - a unified approach to describe diffractive optical elements Electromagnetic Analysis of Axially-Symmetric DOEs Using the FDTD Method New Convex Grating Types Manufactured by Electron Beam Lithography High Efficiency Binary Blazed Grating Waveguide Couplers
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