潜在缺陷的统计异常筛选

J. Tikkanen, N. Sumikawa, L. Wang, L. Winemberg, M. Abadir
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引用次数: 6

摘要

本研究分析了用于汽车市场的高品质soc的参数化晶圆探头测试结果。本产品是安全关键部件,必须具有接近零的次品率(DPPM)。为了达到要求的质量标准,对每个零件进行了全面的参数测试集。在非常罕见的情况下,有潜在缺陷的部分被识别出来。在判定零件失效后,通过失效分析确定缺陷的潜伏期。本文基于参数化晶圆测试中潜在缺陷的早期特征,研究了在晶圆分选过程中筛选潜在缺陷部件的可能性。在早期的工作中,多元离群值分析可以用于捕获高质量生产线[1]的罕见缺陷部件(或退货)。使用参数化晶圆探头测试测量,创建了多变量异常值模型,并应用于预先预测潜在回报。本文分析了三个特定的收益,从其失败分析报告开始,提出了一种统计异常值方法来筛选这一部分。本文将分析具有潜在缺陷的多重收益。
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Statistical outlier screening for latent defects
This study analyzes parametric wafer probe test measurements from high quality SoCs for automotive market. This product is a safety critical part that must have a near zero Defective Parts per Million (DPPM) rate. In order to achieve the required quality standard, a comprehensive parametric test set is performed on each part. In very rare occasions, a part with latent defect is identified. The latency of the defect is established through failure analysis after the part is deemed failing. In this paper, we study the possibility of screening such latent defective parts during wafer sort based on its early signature shown on parametric wafer tests. In earlier works, it is shown that multivariate outlier analysis can be used for capturing the rare defective parts (or returns) for a high quality product line [1]. Using parametric wafer probe test measurements, multivariate outlier models are created and applied to preemptively predict potential returns. This paper analyzes three particular returns, starting from its failure analysis report to suggesting a statistical outlier methodology to screen this part. In this full paper, multiple returns with latent defects will be analyzed.
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