负电容铁电器件温度效应的全耦合模拟

A. Raol, Tom Jiao, Chandana Shashidhara, H. Wong
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摘要

本文以全耦合的方式求解了全耦合的Landau-Khalatnikov (LK)方程和半导体方程,研究了温度对铁电器件负电容(NC)的影响。通过分析计算仔细验证了该框架的有效性。对LK参数进行了标定。研究了温度(100K ~ 500K)对FE电容器和无内部金属栅极的FE无结双栅场效应晶体管(FE- jl - dg - fet)的影响。结果表明,在较低的温度下,FE对负电容的影响增大。在300K条件下,需要高介电常数(介电常数εox = 39)的氧化物才能实现超陡的亚阈值斜率(2.9mV/dec)。如果使用普通的二氧化硅(εox = 3.9),则需要低至100K的温度来保持NC效果。在高VD下,NC效应比低VD时消失得更早。
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Fully-Coupled Simulation of the Temperature Effect on Negative Capacitance Ferroelectric Devices
In this paper, fully-coupled Landau–Khalatnikov (LK) and semiconductor equations are solved in a fully coupled manner to study the temperature effect on negative capacitance (NC) in ferroelectric (FE) devices. The validity of the framework is carefully verified with analytical calculations. LK parameters are calibrated to experiment. The temperature effects (100K to 500K) on the FE capacitors and FE junctionless double-gate field-effect transistor (FE-JL-DG-FET) without an internal metal gate are studied. It is found that the FE effect on negative capacitance increases at a lower temperature in both FE capacitor and FET. High dielectric constant (dielectric constant, εox = 39) oxide is required to achieve super-steep subthreshold slope (2.9mV/dec) in 300K. If regular silicon dioxide (εox = 3.9) is used, a temperature as low as 100K is required to maintain the NC effect. It is also found that at high VD, the NC effect disappears earlier than low VD.
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