MEMS湿度传感器用聚酞嗪酮磺化研究

2018 IEEE Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-01-01 DOI:10.1109/MEMSYS.2018.8346605

Xiaohui Leng, Yiming Wang, Fei Wang

{"title":"MEMS湿度传感器用聚酞嗪酮磺化研究","authors":"Xiaohui Leng, Yiming Wang, Fei Wang","doi":"10.1109/MEMSYS.2018.8346605","DOIUrl":null,"url":null,"abstract":"A simple sulfonation process for Poly(phthalazinone ether ketone) (PPEK) was proposed with concentrated sulfonic acid. Various degrees of sulfonation (DS) were realized through the control of reaction time and temperature. Then, sulfonated PPEK (SPPEK) was applied in humidity sensors with MEMS electrodes. Both spray-coating and drop-casting methods were used to optimize the sensing performance. DS influence on the behavior of humidity sensors was investigated with the optimum coating method.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Sulfonation of Poly(phthalazinone ether ketone) for MEMS humidity sensor\",\"authors\":\"Xiaohui Leng, Yiming Wang, Fei Wang\",\"doi\":\"10.1109/MEMSYS.2018.8346605\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A simple sulfonation process for Poly(phthalazinone ether ketone) (PPEK) was proposed with concentrated sulfonic acid. Various degrees of sulfonation (DS) were realized through the control of reaction time and temperature. Then, sulfonated PPEK (SPPEK) was applied in humidity sensors with MEMS electrodes. Both spray-coating and drop-casting methods were used to optimize the sensing performance. DS influence on the behavior of humidity sensors was investigated with the optimum coating method.\",\"PeriodicalId\":400754,\"journal\":{\"name\":\"2018 IEEE Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"51 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2018.8346605\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2018.8346605","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

提出了用浓磺酸进行聚酞嗪酮(PPEK)磺化的简单工艺。通过控制反应时间和温度，实现了不同程度的磺化反应。然后，将磺化PPEK (SPPEK)应用于MEMS电极湿度传感器。采用喷涂和滴铸两种方法对传感性能进行优化。采用最佳镀膜方法研究了DS对湿度传感器性能的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

Sulfonation of Poly(phthalazinone ether ketone) for MEMS humidity sensor

A simple sulfonation process for Poly(phthalazinone ether ketone) (PPEK) was proposed with concentrated sulfonic acid. Various degrees of sulfonation (DS) were realized through the control of reaction time and temperature. Then, sulfonated PPEK (SPPEK) was applied in humidity sensors with MEMS electrodes. Both spray-coating and drop-casting methods were used to optimize the sensing performance. DS influence on the behavior of humidity sensors was investigated with the optimum coating method.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2018 IEEE Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量