用于荧光传感的集成薄膜硅探测器

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI:10.1109/ICSENS.2018.8589547

Aditi Dighe, N. Jokerst

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摘要

本文报道了一种用于集成微流体系统的薄膜硅芯片级荧光传感器的设计、制造和测试。该光电探测器具有低暗电流(pA)，在532 nm处的响应率为0.3 A/W。对不同荧光团浓度的10微升液滴进行了测试，数据呈线性，模型拟合置信度为95%，信噪比大于20 dB。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Integrated Thin Film Silicon Detectors for Fluorescence Sensing

The design, fabrication and test of a thin film Si chip-scale fluorescence sensor designed for integration with microfluidic systems isG reported. The photodetector has low dark current (pA) and responsivity of 0.3 A/W at 532 nm. Droplets of 10 microliter with varying fluorophore concentrations were tested and the data is linear with a model fit with 95% confidence and signal to noise ratios greater than 20 dB.

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2018 IEEE SENSORS

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