短沟道InGaSb-on-insulator FET:带结和不带结

Md Nur Kutubul Alam, M. Islam, Md Raifqul Islam
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引用次数: 0

摘要

本文以In0.3Ga0.7Sb为通道材料,采用NEGF形式研究了III-V在绝缘子(XOI)和“无结XOI”(JLXOI)上的弹道性能,并进行了比较。在栅极长度为15nm、栅极介电介质EOT为0.5nm时,JLXOI的阈值电压(Vt)和离子(ION)均有显著改善。随着DIBL性能的提高和制造工艺的简化,亚阈值斜率(SS)也从82.35mV/dec降低到68.088mV/dec。
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Short channel InGaSb-on-insulator FET: With and without junctions
In this study the ballistic performance of III-V on insulator (XOI) and “junction less XOI” (JLXOI) nFET are investigated and compared by NEGF formalism, taking In0.3Ga0.7Sb as channel material. At 15nm gate length and 0.5nm EOT of gate dielectric the JLXOI shows significant improvement in threshold voltage (Vt) and ION with a fine tuned IOFF. Also the subthreshold slope (SS) reduced from 82.35mV/dec to 68.088mV/dec along with imporoved DIBL performance and simplified fabrication process.
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