{"title":"带回环补偿和相位稳定的扫描双光束激光干涉仪","authors":"M. Skalský, J. Fialka, Z. Havránek","doi":"10.1109/I2MTC.2019.8826963","DOIUrl":null,"url":null,"abstract":"An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning.","PeriodicalId":132588,"journal":{"name":"2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization\",\"authors\":\"M. Skalský, J. Fialka, Z. Havránek\",\"doi\":\"10.1109/I2MTC.2019.8826963\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning.\",\"PeriodicalId\":132588,\"journal\":{\"name\":\"2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)\",\"volume\":\"53 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-05-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/I2MTC.2019.8826963\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/I2MTC.2019.8826963","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization
An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning.
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