一种基于MNA方法的高灵敏度压阻式加速度计优化设计方法

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI:10.1109/MHS.2009.5352097

T. D. Tran, T. Bui, T. G. Nguyen

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摘要

本文提出了一种利用MNA工具SUGAR设计高灵敏度压阻式加速度计的优化方法。这种新方法的目的是实现器件的高灵敏度。传感器尺寸小至1.5 mm2，适合许多特定应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers utilizing MNA method

This paper presents the novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers using a MNA tool called SUGAR. The purpose of this novel method is to achieve the high sensitivity device. The dimension of sensor is as small as 1.5 mm2, so it is suitable for many specific applications.

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2009 International Symposium on Micro-NanoMechatronics and Human Science

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