NIST的晶圆微波标准

Dylan F. Williams
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引用次数: 6

摘要

美国国家标准与技术研究所已经开始了一项为微波晶圆级探测系统开发标准和校准服务的计划。该标准将基于平面传输线,旨在支持1至40 GHz之间的测量。讨论了项目的目标、组织和计划。
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On-Wafer Microwave Standards at NIST
The National Institute of Standards and Technology has begun a program to develop standards and calibration services for microwave wafer-level probing systems. The standards will be based on planar transmission lines and are designed to support measurements between 1 and 40 GHz. The program objectives, organization, and plans are discussed.
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