{"title":"NIST的晶圆微波标准","authors":"Dylan F. Williams","doi":"10.1109/ARFTG.1989.323951","DOIUrl":null,"url":null,"abstract":"The National Institute of Standards and Technology has begun a program to develop standards and calibration services for microwave wafer-level probing systems. The standards will be based on planar transmission lines and are designed to support measurements between 1 and 40 GHz. The program objectives, organization, and plans are discussed.","PeriodicalId":153615,"journal":{"name":"34th ARFTG Conference Digest","volume":"62 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"On-Wafer Microwave Standards at NIST\",\"authors\":\"Dylan F. Williams\",\"doi\":\"10.1109/ARFTG.1989.323951\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The National Institute of Standards and Technology has begun a program to develop standards and calibration services for microwave wafer-level probing systems. The standards will be based on planar transmission lines and are designed to support measurements between 1 and 40 GHz. The program objectives, organization, and plans are discussed.\",\"PeriodicalId\":153615,\"journal\":{\"name\":\"34th ARFTG Conference Digest\",\"volume\":\"62 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"34th ARFTG Conference Digest\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ARFTG.1989.323951\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"34th ARFTG Conference Digest","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ARFTG.1989.323951","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The National Institute of Standards and Technology has begun a program to develop standards and calibration services for microwave wafer-level probing systems. The standards will be based on planar transmission lines and are designed to support measurements between 1 and 40 GHz. The program objectives, organization, and plans are discussed.