非接触式传输体超导驱动器的研制

S. Kim, K. Kawakami, M. Nishimoto, Y. Okimoto, T. Nakano, S. Murase
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摘要

我们一直在研究一种三维(3-D)超导致动器,利用高温超导体来开发非接触、自由空间移动的传输装置。所提出的超导致动器由二维排列的电磁铁构成定子,高温超导体作为动器。二维排列的电磁铁被单独控制来移动高温超导体。我们所提出的三维超导致动器有望作为一种输送装置应用于不喜欢机械接触和粉尘的硅片制造的洁净室。为了实现高温超导体的超导执行器,需要明确高温超导体的电磁特性,如捕获场强和模式,并优化控制系统。因此,为了构建最优的三维致动器系统,本研究通过实验研究了单独控制四个电磁铁的高温超导体悬浮的基本特性。
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Development of superconducting actuator for the contactless transporter
We have been investigating a three-dimensional (3-D) superconducting actuator using HTS bulk to develop the transportation device with non-contact and move in free space. Proposed superconducting actuator consists of the stator constructed by two-dimensional arranged electromagnets and HTS bulk superconductor as a mover. The 2-D arranged electromagnets were individually controlled to move the HTS bulk. It is expected that our proposed 3-D superconducting actuator will be useful as a transporter used in clean room which manufactures the silicon wafer where dislikes mechanical contact and dust. To realize the superconducting actuator with HTS bulks, the electromagnetic characteristics of HTS bulk, such as trapped field strength and patterns, should be clarified and the optimized controlling system is also required. Therefore, in this study, to construct the optimal 3-D actuator system, the fundamental characteristics of the levitation for HTS bulks with individually controlled four electromagnets were investigated experimentally.
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