New Method for Enhancing Photon Emission Measurements Similar to 2D-Tomography

We present a new experimental method for enhancing quality and accuracy of photon emission measurements (PEM). The technique consists of taking emission images of the device rotated through several different angles. The independent information from several images is then used to numerically calculate an emission pattern, which is superior to just one single PE image. Therefore, the method also allows for spectral photon emission analysis (SPEM) in cases, where emission overlap of neighboring devices prevented SPEM analysis up to this date. This publication gives an overview of the theoretical, experimental and numerical basics of the new method. To give a proof-of-concept we apply the method to a sample case of spectral photon emission and electron temperature analysis of a ring oscillator built in 120nm technology. The obtained results are then compared to data acquired by a conventional measurement on a location of the ring oscillator (RO), where conventional analysis was possible.