多层陶瓷电容器的压电力显微镜表征

G. Pascual, Cathy Lee, J. P. Pineda, Byong Kim, Keibock Lee
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引用次数: 0

摘要

材料的电气和机械响应之间的耦合是一种基本特性,它为各种应用提供了功能,从传感器和执行器到能量收集和生物学。大多数材料在纳米尺寸的域中表现出机电耦合。因此,为了了解这些材料的结构和功能之间的关系,需要在纳米尺度上进行表征。这种特性可以使用压电力显微镜(PFM)以一种非破坏性的方式直接测量,这是Park Systems公司所有原子力显微镜(afm)的标准模式。此外,PFM可以作为一种光谱工具来评估压电畴的开关。本文演示了PFM在多层陶瓷电容器失效分析中的应用。地形和电信号的相关成像揭示了器件中的不连续结构,这可能对器件性能有直接影响。在特定的压电区域进行光谱测量,以测量畴性质,如翻转极化方向所需的电场(矫顽力电压)。
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Characterization of Multilayered Ceramic Capacitors via Piezoelectric Force Microscopy
The coupling between an electrical and mechanical response in a material is a fundamental property that provides functionality to a variety of applications ranging from sensors and actuators to energy harvesting and biology. Most materials exhibit electromechanical coupling in nanometer-sized domains. Therefore, to understand the relationship between structure and function of these materials, characterization on the nanoscale is required. This property can be directly measured in a non-destructive manner using piezoelectric force microscopy (PFM), a mode that comes standard in all atomic force microscopes (AFMs) from Park Systems. Additionally, PFM can be used as a spectroscopic tool to evaluate switching of piezoelectric domains. Here we demonstrate the utility of PFM for failure analysis of a multilayered ceramic capacitor. Correlative imaging of topography and electrical signals revealed discontinuous structures in the device that likely had a direct effect on device performance. Spectroscopy was also performed at a specific piezoelectric region to measure domain properties, such as the electric field required to flip the polarization direction (coercive voltage).
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