尺寸对/spl α /-石英介电强度影响的蒙特卡罗模拟

K. Oh, C. Ong, B. Tan, C. Gressus
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引用次数: 3

摘要

介质在表面空间电荷场作用下的尺寸效应(SF)被定义为曲线ln(V/sub s//r) vs ln(r)的斜率,其中V/sub s/和/spl Gamma/分别是样品的临界表面电位和长度。SF是影响介质击穿电压、空间电荷脱集场、摩擦系数、磨损和断裂韧性的重要材料参数。在本工作中,研究了顺流效应。在扫描电子显微镜下,利用电子束轰击介质进行了实验研究。不同尺寸下的空间电荷分布分别由宏观方程和微观模拟得到。
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Monte Carlo simulation of size effect on the dielectric strength of /spl alpha/-quartz
The size effect (SF) in a dielectric subjected to a surface space charge field has been defined as the slope of the curve ln(V/sub s//r) vs ln(r), where V/sub s/ and /spl Gamma/ are the critical surface potential and length of the sample, respectively. SF is an important material parameter affecting the breakdown voltage, the space charge detrapping field, the friction coefficient, the wear and the fracture toughness of the dielectric. In the present work, the SF effect was investigated. The experimental study was carried out in an SEM (scanning electron microscope) using an electron beam to bombard the dielectric. The space charge distributions for different sizes are obtained separately from macroscopic equations and microscopic simulation.<>
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